Humidity & Temperature Control Systems In Semiconductor Industry
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Humidity & Temperature Control Systems In Semiconductor Industry

By 17/12/2021No Comments

Dpstar is a global leading provider of humidity and temperature control systems in the semiconductor industry. We offer an extensive range of products, which are widely used in the semiconductor industry to eliminate condensation on wafers, drying ovens and other critical parts. Humidity and temperature control are critical for the success of applications and processes in the semiconductor industry, and they also play a key role in ensuring their quality and productivity. Owing to a few recent trends, there has been an increasing demand for high-temperature control as well as uniform and fast humidity & temperature control system solutions in the semiconductor industry.

At Dpstar, we specialize in the design of efficient humidity and temperature control solutions for the semiconductor industry. All our solutions are devised based on our understanding of semiconductor technologies and their complex requirements. Our innovative and customized solutions not only address specific challenges in the semiconductor industry but are also responsive to ongoing trends shaping the industry.

Why Choose Dpstar

Humidity & Temperature Control Experts

We understand that a minor variation in humidity and temperature can bring huge losses for a successful business. So we know the importance of having accurate temperature and humidity data.

Superior Monitoring Solutions

Multiple temperature sensors can be installed at a site to provide temperature distribution across points within a shelter, and with an air conditioner controller, the environment can be regulated.

Real-Time Monitoring

It is measured by our system and can be viewed in real-time. Historical data is also available and can be viewed as daily, weekly, monthly, or quarterly reports or graphs.

Alert System

Alerts when temperature or humidity goes beyond a specified range.

The Importance Of Temperature & Humidity Monitoring In Semiconductor Cleanrooms

Relative humidity is one of the environmental conditions usually specified for cleanroom operations. Relative humidity in a semiconductor cleanroom is typically controlled to a target value somewhere within the 30 to 50 percent range, and with tolerances as narrow as ± 1 percent for some areas, such as photolithography or even less for deep ultraviolet processing (DUV) and relaxing to ± 5 percent in other areas. Keeping makeup air within these specifications throughout the year entails capital and operating expenses. But why does control of relative humidity in a cleanroom warrant such costs? Quite simply, because relative humidity influences a number of factors that could degrade overall cleanroom performance, including:

Bacteria Growth

Personnel Comfort Zone

Static Charge Build-Up

Metal Corrosion

Moisture Condensation

Water Absorption

How To Protect Semiconductors

When manufacturing microchips or semiconductors, it is important manufacturers adhere to specific humidity contingencies.  To ensure an ideal manufacturing environment free of excess humidity and temperature, the right sensor is the key to keeping your cleanroom facilities running smoothly. A high-quality sensor will provide long-term production benefits and cost savings by preserving the semiconductor production process. It is important to consider the following processes and equipment during manufacturing and the potential effects of excess humidity.

Assembly

Moisture unfavorably affects the bonding process and enhances corrosion deficiencies when manufacturing integrated circuits and semiconductors. Polymer compounds, known as photoresists, are hygroscopic. These compounds are used in manufacturing circuit lines for transferring methods in semiconductors and, when in contact with moisture, these lines may break or bridge —ultimately, causing circuit malfunction.

Photolithography

Ideally, the humidity in a manufacturing facility’s photolithography room should be between 20 to 35 percent RH at 200° C. Percentages above that may result in irregular adhesion of the photoresists. This can affect surface deficiencies and create a stress crack in the product.

Wafer Fabrication

During wafer manufacturing, the spinners spray developer on the wafer surface. This causes the solvent on the wafer to evaporate, producing vapor on the surface of the wafer. In turn, this also modifies the developer, causing the wafer surface to swell.

Vacuum Devices

Excess humidity in an environment may also affect other plant equipment. For example, Cryopumps may become inactive due to the water vapor pressure. However, if the moisture levels are between 30 to 35 percent, the processing velocity of the equipment remains ideal.

Our Semiconductor Environment Control Capabilities

To accommodate our customers who develop and manufacture semiconductors, our customized environmental control units (ECUs) facilitate stringent temperature and humidity tolerances, including:

  • Control tolerances of +/- 0.02º C
  • Setpoint temperature ranges between 19º C and 23º C
  • Relative humidity tolerances of +/- 0.5% RH
  • Airflow ranges up to 4000 CFM

We’ve put our expert knowledge in humidity and temperature measurement into the development of our wide range of accurate, reliable and durable sensors, probes and transmitters, designed to meet the requirements of demanding industrial applications.

Explore Our Products

Get In Touch With Our Experts Today!

Dpstar Group
No 35, Jalan OP ½, Pusat Perdagangan One Puchong,
Off Jalan Puchong, 47160 Puchong,
Selangor Darul Ehsan, Malaysia.
Email: [email protected]

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